HHV LtdThin film deposition tools for science and industry

HHV LtdThin film deposition tools for science and industry

BT 150 and BT 300 bench top coating systems

BT 150 is perfect to deposit conductive coatings for sample preparation in SEM and TEM imaging. BT 300 is used for research coating on samples up to 200mm diameter. A fully automated user-interface provides single touch deposition capability from a range of pre-programmable recipes.

Features

    Recipe process control with full colour touch screen
    Turbo pump option
    Evaporation, sputtering and etch process for sample prep
    Integrated film thickness monitoring option
    Static, rotary or planetary sample stages
    Compact design - 660 mm x 520 mm system footprint
Made with