HHV Limited
HHV Ltd.
Unit 2
Stanley Business Centre
Kelvin Way
Crawley
RH10 9SE
United Kingdom
Tell : +44(0) 1293 611898
Fax : +44(0) 1293 512277
E-mail : info@hhvltd.com

 

 
 
           
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Process consumables and spare parts and for your Auto306 and Auto500
   
 
         
       
 

Consumable items and original spare parts for your Auto306 and Auto500 deposition system

At HHV Ltd we offer a range of process consumables, spare parts and accessories for your coating system.

Our range of process consumables has been specially selected for use with the original E306, Auto306 and Auto500 resistance and electron beam sources.

We supply additional or replacement process accessories such as filament holders, substrate heaters and work holders which are made to original Edwards drawings and quality. You can replace worn-out accessories with new ones, or enhance your system by adding extra or alternative sources.

HHV Ltd can also provide consumables for older Edwards systems such as S150B, E306, 12E, 19E, E610 – please contact us with your requirements.
Boats, filaments, baskets, monitor crystals and e-beam crucible liners
Boats, filaments, baskets, monitor crystals and
e-beam crucible liners

 

Filaments and boats for resistance evaporation sources

Specially selected for use with resistance sources on the Auto306 and Auto500 systems, these sources are also suitable for use with the older E306 and E306A coating systems.

  
Tungsten filaments Tungsten baskets Tungsten, molybdenum & tantalum boats

 

Type Description A
(mm) 		B
(mm) 		C
(mm) 		D
(mm) 		Typical
current (A) 		Part
number		 Equivalent to
Edwards
number		 Price
WA2 Tungsten filament 75 4.8 25 - 40-60 100102 H01401002 Enquiry
WA4 Tungsten filament 75 6 25 - 40-60 100104 H01401003 Enquiry
WB2 Tungsten basket 75 4.8 12 - 40-60 100152 H01401022 Enquiry
WB6 Tungsten basket 75 13 12 - 80-100 100156 H01401023 Enquiry
MC1 Molybdenum dimple boat 50 5 1.5 6 60-70 100201 H01401040 Enquiry
WC1 Tungsten dimple boat 50 5 1.5 6 70-80 100202 - Enquiry
TC1 Tantalum dimple boat 50 5 1.5 6 50-60 100203 - Enquiry
MC3 Molybdenum dimple boat 50 9 3 10 100-120 100301 H01401041 Enquiry
WC3 Tungsten dimple boat 50 9 3 10 140-150 100302 - Enquiry
TC3 Tantalum dimple boat 50 9 3 10 100-120 100303 - Enquiry

 
EB3 electron beam source crucible liners and filaments

These liners are matched to the compact EB3 electron beam source. Available in graphite, molybdenum, boron nitride, intermetallic and aluminium oxide.

We offer replacement filaments for the EB3 source. The EB3 filament also fits the older Edwards EB1 source.

Type Description Part
number		 Equivalent to Edwards number Price
4CCGR Graphite liner for EB3 source with 4cc crucible 100401 E09088030 Enquiry
4CCMO Molybdenum liner for EB3 source with 4cc crucible 100402 E09088031 Enquiry
4CCBN Boron nitride liner for EB3 source with 4cc crucible 100403 - Enquiry
4CCIN Intermetalli liner for EB3 source with 4cc crucible 100404 E09088032 Enquiry
4CCAO Aluminium oxide liner for EB3 source with 4cc crucible 100405 - Enquiry
EB3FIL Filament for the EB3 source (also fits EB1) 100411 E03615005 Enquiry

 

Quartz monitor crystals

High-quality 14mm diameter, 6MHz quartz crystals for use with the FTM5, FTM6 and FTM7 film thickness monitors, plus monitors and controllers from Sigma, Inficon and other manufacturers.


Type Description Part Number Equivalent to Edwards number Price
CRYS01 14mm, 6MHz quartz crystal, gold coated 300021 E08668000 Enquiry
CRYS02 14mm, 6MHz quartz crystal, silver coated 300022 - Enquiry

 
Original
Product
code		 Description Price
D15701042 Fluoroelastomer gasket Scancoat6 Enquiry
E00100202 Nitrile gasket Scancoat6 Enquiry
E00100234 Emitter flanged insulating bush Enquiry
E02512000 Domed bell jar kit  Enquiry
E02701003 Carbon Rod 6.35 X 120mm Long Enquiry
E02703004 Cermet Hearth 6 Position EBS Pk5 Enquiry
E03300012 Insulator Bush Enquiry
E03615005 Filament For EB1/EB3 Sources Pack Of 10 Enquiry
E03615015 Magnet For Bent Beam Source Enquiry
E03615017 Liner Intermetallic Hearth Enquiry
E03615018 Copper Crucible Hearth For Bent Beam source Enquiry
E03615021 Carbon Hearth Liner For Bent Beam Source Enquiry
E03619015 Filaments 6 Position EBS Pk5 Enquiry
E04805011 Gasket 12" Viton for E306 / Auto306 chamber Enquiry
E05201000 Specimen cooling finger Enquiry
E06900067 Implosion Guard Closed E306A Enquiry
E06900155 Implosion Guard Open E306A Enquiry
E06902002 Workchamber 12" x 14" E306A Glass Cylinder Enquiry
E08508040 3mm Carbon Rod Shaper Enquiry
E08519011 Fixed Collett 6.35mm Enquiry
E08519012 Moving Collett 6.35mm Enquiry
E08519013 Moving Collett 3mm Enquiry
E08519015 Spring Carbon Evaporation Source Enquiry
E08519018 Mica Insulator C Evs  Enquiry
E08519022 Fixed Collett 3mm Enquiry
E08519030 Carbon Rod 3mm X 300mm Pk 20 Enquiry

 
E09028000 single resistance source
E09028000 single resistance source

 

E09039000 carbon evaporation source
E09039000 carbon evaporation source
Original
Product
code		 Description Price
E08535000 TEM magnetic grid holder  for Rotatilt3  Enquiry
E08569003 Braid Assembly Enquiry
E08570011 Motor & Gearbox Rotatilt 3 Enquiry
E08571000 3mm TEM Grid Holder For Rotatilt 3 Enquiry
E08572000 SEM Planetary Workholder For Rotatilt 3 Enquiry
E08573000 Plane Workholder For Rotatilt3 Enquiry
E08664000 FTM6 Film Thickness Monitor Enquiry
E08666000 FTM5/FTM6/FTM7 Oscillator & Cable Enquiry
E08667000 FTM5/FTM6/FTM7 Crystal Holder Enquiry
E08667002 Cable Assembly 750mm Long Enquiry
E08667018 Spring Clip Spare Enquiry
E08668000 Spare Crystals FTM5/6/7 Pk5 Enquiry
E08669000 FTM7 Film Thickness Monitor Enquiry
E08703047 Cylinder Glass S150A/B ETD4 Scancoat 6 Enquiry
E08703048 Implosion Guard For S150A Enquiry
E08712072 Copper Target For Scancoat 6 & S150B Enquiry
E08732000 Platinum Target Scancoat 6 &S150B Enquiry
E08733000 Gold/Palladium Target, SC6 & S150B Enquiry
E08734000 Iron Target For Scancoat 6 & S150B Enquiry
E08741000 Shutter For Scancoat 6 & S150B Enquiry
E08742000 Metallurgical Sample Holder For S150B Enquiry
E09020000 Bell Jar Lift For Auto306 Enquiry
E09021000 Plasmaglo glow-discharge accessory  Enquiry
E09022000 Tripod Enquiry

 
E09072000 EB3 electron beam source, spares and accessories
E09072000 EB3 electron beam source,
spares and accessories

E10014000 and E10034000 leadthroughs, E09038018 and E09038019 insulators
E10014000 and E10034000 leadthroughs

E10014000 and E10034000 leadthroughs, E09038018 and E09038019 insulators
E09038018 and E09038019 insulators

 
Original
Product
code		 Description Price
E09023000 Baffle plate  Enquiry
E09024000 Quartz Lamp Heater 500W Enquiry
E09025000 DC glow discharge bar  Enquiry
E09026000 Radiant Heater For Auto 306 Enquiry
E09027000 Glass Cylinder Chamber Kit For Auto 306 Enquiry
E09028000 Filament Holder For Auto 306 Enquiry
E09029000 Rotatilt 3 work holder drive unit  Enquiry
E09032000 Manual Source shutter  Enquiry
E09033000 LT selector switch   Enquiry
E09035000 HT/LT current controller  Enquiry
E09037018 Insulator Pvzm0300 Enquiry
E09037019 Insulator Pvzm0301 Enquiry
E09037026 Intermetallic Hearth Pk Of 5 Enquiry
E09038000 Four position turret resistance source  Enquiry
E09038018 Split Bush Female Insulator Enquiry
E09038019 Split Bush Male Insulator Enquiry
E09038029 Spare Flexible Connector Enquiry
E09039000 Carbon evaporation source  Enquiry
E09044000 Electromagnetic Shutter Actuator Enquiry
E09045000 Electro Magnetic Source Shutter Controller Enquiry
E09046000 EB1 Electron Beam Source Enquiry
E09049000 Rotary Workholder For Auto306 Enquiry
E09049000 260mm rotary work holder  Enquiry
E09052000 HT Power Supply For Auto 306 Enquiry
E09058000 Workholder Ring Enquiry
E09060000  3kW power supply for EB3, 50Hz  Enquiry
E09061000 3kW power supply for EB3, 60Hz  Enquiry
E09062000 Top plate counterbalance  Enquiry
E09063000 100A/200A LT transformer   Enquiry
E09064000 LT Transformer 10V 90A/30V 30A Enquiry
E09065000 Auto Gas Bleed Kit Enquiry
E09066000 Work holder dome  Enquiry
E09070000 350A LT transformer   Enquiry

 
Original
Product
code		 Description Price
E09072000 EB3 electron beam evaporation source  Enquiry
E09080000 Feedthrough kit for EB3  Enquiry
E09081000 Water flow switch for EB3  Enquiry
E09082000 X-Y beam sweep unit for EB3  Enquiry
E09083000 Motorized turret drive kit for EB3   Enquiry
E09084000 Manual drive kit for EB3   Enquiry
E09088030 Graphite liner 4cc Enquiry
E09088031 Molybdenum liner 4cc Enquiry
E09088032 Intermetallic liner 4cc Enquiry
E09090000 FL400 front loading chamber  Enquiry
E09091000 Chamber liners for FL400 Enquiry
E09092000 Periscope Accessory  Enquiry
E09093000 EB3 Side mounting kit for FL400 chamber  Enquiry
E09303000 EPM75 magnetron source Enquiry
E09304000 EPM100 magnetron source Enquiry
E09702001 2cc conical alumina crucible Enquiry
E09702002 2cc conical aluminium nitride crucible Enquiry
E09702003 2cc conical boron nitride crucible Enquiry
E09702011 2cc cyl alumina crucible & quartz insert Enquiry
E09702012 2cc cyl alum nitride crucible & quartz insert Enquiry
E09702013 2cc cyl boron nitride crucible & quartz insert Enquiry
E10001001 NW10 blanking plug Enquiry
E10004001 NW25 blanking plug Enquiry
E10014000  LT earth / ground leadthrough  Enquiry
E10024000 10EK25 water cooled leadthrough  Enquiry
E10031000  7EK10 leadthrough  Enquiry
E10034000  6EK25 leadthrough  Enquiry
E10041040 4RK10 rotary leadthrough  Enquiry
E10044040 8RK10 rotary leadthrough  Enquiry
E10044120 12RK10 rotary leadthrough  Enquiry
E10054000 TL8K25 leadthrough  Enquiry
E10074000 Earth, 6EK25 leadthrough extension Enquiry
E10074005 10EK25 leadthrough extension Enquiry

 
 
 
 
 
     
 
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