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HHV Scancoat Six, Auto306, Auto500 and TF600 deposition systems. Manufactured using technology licensed from Edwards Ltd
   
 
         
    HHV Scancoat Six bench-top sputter coater for electron microscopy  
 

 

The HHV Scancoat Six

The Scancoat Six is a compact sputter coater for the preparation of samples for Scanning Electron Microscopy (SEM). The system is straightforward in operation and is designed to coat SEM samples with a high-quality conductive metal film. The system can coat the whole sample surface, including samples with re-entrant surfaces.

System features

  • Automated sputtering with digital process timer for repeatable operation
  • Straightforward operation
  • Cool’ sputtering helps to prevent heat damage to delicate specimens.
  • Water-cooled copper specimen table provides additional heat sink capacity to further reduce heating of delicate samples.
  • Built-in sputter etch / sample clean facility.
  • Universal specimen holder accepts sample stubs from most EM manufacturers.
  • Optional carbon evaporation accessory for TEM and x-ray microanalysis sample preparation.
  • Supplied with rotary pump, 0.1mm gold target and built in feed through for optional film thickness monitor.

The Scancoat Six is offered with a gold target as standard. Other targets are
available in platinum, gold/palladium alloy, copper and iron.

 

HHV Scancoat Six bench top sputter coater
HHV Scancoat Six bench top sputter coater

Carbon accessory

Researchers working with Transmission Electron Microscopy (TEM) can use the optional carbon evaporation accessory for the production of carbon films.

The carbon fibre evaporation source is mounted on a chamber top plate and provided with a power supply module. The chamber top plate fits directly onto the Scancoat chamber in place of the sputtering top plate. A support on the power supply module holds the chamber top plate when not in use, freeing both hands for carbon fibre loading.

Operation is simple with an "out gassing" power setting for heating the . A shutter is provided to protect specimens from radiated heat during out gassing. A push button enables full power to be applied to the fibre to "flash" evaporate it.

Each accessory is supplied with 3 m of carbon fibre.

 

Scancoat Six technical data

Work chamber Material : Borosilicate glass with acrylic implosion guard
Size : 150 mm Ø, 115 mm high
Water-cooled copper worktable : 100 mm Ø
Removable workholder Diameter : 100 mm Ø
Number of 3.2 mm Ø holes 6
Number of 10 mm Ø holes 6
Number of SEM stubs holes 6
Vacuum system  
Direct drive rotary pump : Edwards RV3
Gauge : Edwards Pirani Gauge
Process gas
   
Type : Argon (regulated supply required)
Connectors : Push-fit for 6 mm od nylon
Control : Multi-turn needle valve
Time to evacuate work
chamber to operating pressure
: 60 sec
Sputtering rate : Up to 60 mm min
High voltage supply : 1500 V d.c. at 50 mA
HT meters    
Current : 0 - 100mA with overload protection
Voltage : 0-2.5 kV
Programmable digital timer : 0 s to 100 minutes, automatic reset

Dimensions

: 470 mm wide
375 mm deep
450 mm high
Weight : 22 kg
Carbon evaporation accessory for Scancoat Six
Carbon evaporation accessory for Scancoat Six
 
 

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