The HHV TF600 thin film deposition system for the R&D laboratory or production facility
The HHV TF600 system is designed for increased levels of process capability.
Customers can choose between a cost-effective PLC control system or a full PC control system with extensive process control capability.
The 600mm wide chamber is pumped by a choice of turbo pumps or cryo pumps which have sufficient pumping speed to support ion sources for ion beam assisted deposition or etch.
With its range of 600mm wide chambers, custom base plate and top plate arrangements plus choice of deposition accessories and high-throughput pumping systems the TF600 offers users a highly flexible platform for research and production.
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TF600 with PLC control. The capable deposition tool for hands-on users
The TF600 with PLC control offers researchers a capable but affordable tool for research and development. An industry-standard PLC with touch-screen panel controls the vacuum system while the user operates the deposition accessories.
Process control options provide the capability to run multi-layer deposition cycles with one-button operation.
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TF600 chamber with 6kW electron beam source, 4” sputter source
and resistance sources |
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TF600 with PC control for advanced research and production
TF600 is offered with full PC control. The PC runs a Windows-based SCADA system using industry-standard software. Full recipe process control is provided with individual accessory setting available by ‘pop-up’ windows on the full-size colour screen.
The control system provides automatic sequence control and data logging for the coating process plus control and monitoring of the vacuum system.
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| TF600 console with PC control |
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| TF600 features |
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- Resistance sources, electron beam source, DC and RF sputter deposition sources
- Ion beam sources for etch and for ion beam assisted deposition
- Manual source and accessory operation
- Quartz crystal controllers for deposition control
- Full PC deposition control
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- TF600 standard chamber, 600mm wide x 500mm tall with 100mm diameter viewport and chamber liners
- Extended height options for specific applications
- Water-cooled variants for use with high temperature substrate heating.
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- PLC system controller with touch-screen for vacuum system control
- PC control running comprehensive vacuum system and process control software
- Automatic high vacuum valve to protect pumps and process
- Comprehensive interlocks to maximise operator safety
- The TF600 carries the CE mark
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- 1600l/s or 2200l/s mag-lev turbo pumps
- 1500l/s or 3500l/s cryo pumps
- Dry scroll backing/roughing pump
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