HHV Auto500GB deposition system for glove box integration
The Auto500GB is designed for integration into glove boxes. The system is fitted with a special chamber to allow straightforward integration into glove boxes from most major manufacturers. The chamber is fitted with a vertically-opening front door which allows access from the glove box, while a hinged rear door allows access for service without compromising the glove box atmosphere.

Source options include a temperature-controlled effusion source for the deposition of organic materials.

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Process accessories

• 500mm wide and 500mm wide stainless steel box chambers with options for water cooling
• Single or multiple resistance sources, four position turret resistance source
• Temperature-controlled sources and controllers for organic materials
• 3kW multi-pocket electron beam source
• Static and rotary work holders
• Source shutters and substrate shutters
• Glow discharge cleaning
• Film thickness monitoring