HHV Limited
HHV Ltd.
Unit 2
Stanley Business Centre
Kelvin Way
Crawley
RH10 9SE
United Kingdom
Tell : +44(0) 1293 611898
Fax : +44(0) 1293 512277
E-mail : info@hhvltd.com

 

 
 
           
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HHV Scancoat Six, Auto306, Auto500 and TF600 deposition systems. Manufactured using technology licensed from Edwards Ltd
   
 
HHV Scancoat Six HHV Auto306 HHV Auto500 HHV Auto500 Glove Box HHV TF600
         
    HHV Auto306. The versatile choice for the researcher and the electron microscopist
 
 

 

The HHV Auto306 for Research and Development

Offering a choice of vacuum systems, chambers and thermal deposition accessories the HHV Auto306 can be configured to meet a wide range of requirements in the R&D laboratory.

Process accessories

  • Glass bell jar, glass cylinder or stainless steel box chamber options
  • Single or multiple resistance sources
  • Four position turret resistance source
  • EB3 compact 3kW, four-pocket electron beam source
  • Temperature controlled sources for organic electronic materials
  • Combination electron beam and resistance evaporation systems
  • Static and rotary work holders  Substrate heating systems
  • Source shutters  Glow discharge cleaning
  • Film thickness monitoring

We are also pleased to discuss customised solutions for those users who have more exacting requirements.

HHV Auto306 with FL400 box chamber
HHV Auto306 with FL400 box chamber
 
 
Auto306 with 4-position turret resistance source The EB3 compact 3kW, 4-pocket electron beam source Interior of FL400 chamber showing EB3 electron beam source, two resistance sources and quartz lamp substrate heater.
Auto306 with 4-position turret
resistance source		 The EB3 compact 3kW, 4-pocket
electron beam source		 Interior of FL400 chamber
showing EB3 electron beam source,
two resistance sources and quartz
lamp substrate heater.
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The HHV Auto306 for Electron Microscopy  
   
With it’s range of full-size chamber, process accessory and vacuum system options, the HHV Auto306 offers EM users a range of techniques to complement the most advanced TEMs and SEMs

Process accessories

  • Resistance sources for SEM metals evaporation
  • Carbon rod source for TEM, carbon fibre evaporation for TEM
  • Combination systems for both TEM and SEM
  • Evaporate upwards or downwards configurations
  • Rotatilt 3 workholder with rotation and variable tilt facility offers
    • Standard TEM grid holder
    • Magnetic TEM grid holder
    • Planetary workholder for up to six standard SEM stubs
    • 80mm diameter plane work holder for 3-D samples
  • Manual or electric source shutter
  • Glow discharge cleaning
  • Film thickness monitoring

We are also pleased to discuss customised solutions for those users who have more exacting requirements.

HHV Auto306 with glass bell jar chamber
HHV Auto306 with glass bell jar chamber
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Auto306 with resistance source, carbon source and Rotatilt3 work holder. Rotatilt3 work holder with TEM grid holder
Auto306 with resistance source,
carbon source and Rotatilt3 work holder.		 Rotatilt3 work holder with TEM grid holder
   
The HHV Auto306 features  
   

Vacuum systems

  • 600l/s diffusion pump
  • 250l/s turbo molecular pump
  • 500l/s turbo molecular pump
  • 14.3m3/h oil sealed rotary pump and liquid nitrogen trap as standard.
  • Options for dry scroll pump and mag-lev turbo molecular pump

Chambers

  • Domed  glass bell jar with optional bell jar lift
  • Glass cylinder with aluminium top plate and optional
    top plate counterbalance
  • FL400 front loading ‘box’ chamber with 100mm
    diameter viewport and chamber liners

Controls and safety

  • PLC system controller with touch-screen for vacuum system control
  • Automatic high vacuum valve protects pumps and process
  • Comprehensive interlocks to maximise operator safety
  • The Auto306 carries the CE mark

Future upgrades

  • A feature of the modular design of the Auto306 is that
    the system can be re-configured or upgraded
    with additional accessories as requirements change
    over time.
 
 
Ultimate vacuum
600 l/s Diffusion pumped*
255 l/s turbo pumped*
500 l/sturbo pumped*


2 x 10-7 mbar
5 x 10-7 mbar
2 x 10-7 mbar
Liquid nitrogen trap capacity 1.4 litres
Weight (approximate) 200 kg
Electrical supply

240 or 220 V 1-ph 50 Hz
or 210 V 1-ph 60 Hz
Enclosure rating IP20
Pumpdown time
Time to 10-5 mbar*
Time to 10-6 mbar*
4 minutes
25 minutes
Tested leak rate 10-9 mbar l/s
 
     
 

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